SHIBAURA
SHIBAURA MECHATRONICS CORPORATION
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BM-1000 Single-Wafer, Multi-Layer Sputtering Equipment

BM-1000 Single-Wafer, Multi-Layer Sputtering Equipment

Realizes low running costs and high productivity and saves space.

Features

  • Single-wafer load lock sputtering equipment
  • Supports wafers up to a maximum of eight inches
  • Extendable to a maximum of five processing chambers
  • Inverse sputtering with our original cup gun method secures less damage
  • Capable of mounting heating unit





















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