Reform surface of plastics with thin air ionized by microwave energy.
The surface is reformed by high-density low temperature plasma without being affected by the microwave, improving hydrophilicity and adhesiveness.
A wide-ranging product lineup covers a small chamber type for laboratory use to large equipment with a 2m diameter for plasma processing.
|Microwave output||1.5kW×1 (2M164×1)|
|Plasma generating system||1 system|
|Throughput||40 to 670Pa (0. 3 to 5Torr)|
|Chamber dimensions||Φ600×Length 800mm|