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SHIBAURA MECHATRONICS CORPORATION
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OCTAVA Series Multi-layer Sputtering Equipment

OCTAVA Series Multi-layer Sputtering Equipment

Sputtering equipment for rewritable optical discs, including DVD-RAM. Realizes high throughput, high film forming efficiency and low running costs by forming film on four rotating 120mm diameter discs at the same time.

Features

  • Simulation supports decisions on optimum dimensions
  • Newly developed vacuum motor allows film to be forming on rotating discs
  • High performance carrier mechanism supports multi-disc carrier
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