SHIBAURA
SHIBAURA MECHATRONICS CORPORATION
Home > Products > Media Device Manufacturing Equipment > Single Layer Sputtering Equipment

Stella Series Single Layer Sputtering Equipment

Stella Series Single Layer Sputtering Equipment

Sputtering equipment for DVD-ROM, DVD±R and other optical discs that brings a new concept to DVD+R DL, HD-DVD and Blu-ray

Features

  • Highly uniform film thickness: ±2.0% (absolute value)
    (K-type sputter source for semi transparent layer)
  • Shot count: 1 million times or more
  • A single unit can form Si, Ag, Agx, Au and Al films
    Able to forming five different films simply by replacing the target
  • High operability, high maintainability
  • Supports sputtering on CD (1.2mm thick) and DVD (0.6mm thick) without any modification to the equipment
Page Top