SHIBAURA
SHIBAURA MECHATRONICS CORPORATION
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Wafer Marker

Wafer Marker

Wafer marker to print control numbers on silicon wafers.
Clean micro-marking minimizes dust generation in the semiconductor process.

Features

  • High speed, clean marking
  • Compact design
  • Easy maintenance (totally air cooled LD pumped)
  • 3-, 4- and 5-inch, 5- 6- and 8-inch, 8- and 12-inch, 12-inch Foup dedicated
Item   Remark
Oscillation wavelength 1.06µm/0.53µm LD pumped
Laser output 5W/1.6W  
Marking accuracy 0.1 ~ 0.2mm  
Throughput 100 to 240pcs Wafer/h

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